The objective of this paper is to assess a micro electromechanical (MEMS) resonator. When designing micro resonators, it is essential to take into account factors such as the structure, actuator, and applied cases as they have a significant impact on the quality coefficient, power consumption, and operating frequency. This study begins by designing the resonator and examining different structures. Initially, a mechanical analysis of the micro resonator is conducted using Comsol 3.5 software to optimize its dimensions. The bias voltage applied to the micro resonator is 1.1V, and the switching time is 120 microseconds. The simulation results confirm our claim
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